This handbook covers a wide range of deposition process technologies, including plasma deposition; surface preparation; evaporation; sputter deposition; ion plating; chemical vapor deposition (CVD); plasma-enhanced CVD; plasma-assisted vapor deposition; deposition from aqueous solutions; advanced thermal spray deposition; metallurgical coating applications; nucleation, film growth, and microstructural evolution; characterization of thin films and coatings; and more.

From the Preface: “...Applicatons of films and coatings span the entire gamut of science and technology. Generic application areas include electronic, magnetic, optical, mechanical, chemical, and decorative applications. New deposition technologies such as arc evaporation, unbalanced magnetron sputtering, ion beam assisted deposition, and metal—organic CVD have come on stream for critical applications...The core subjects are the basic technologies for the deposition of films and coatings...We hope that this volume will be useful to the multitude of desciplines represented by the workers in this field and provide a source for future developments.”

Target Audience: Researchers and technologists in industry and academia who are concerned with deposition technologies for films and coatings.

Table of Contents:

Deposition Technologies: An Overview

Plasmas in Deposition Processes

Surface Preparation for Film and Coating Depostion Processes

Evaporation: Processes, Bulk Microstructures and Mechanical Properties

Sputter Deposition Processes

Ion Plating

Chemical Vapor Deposition

Plasma-Enhanced Chemical Vapor Deposition

Plasma-Assisted Vapor Deposition Processes: Overview

Deposition from Aqueous Solutions: An Overview

Advanced Thermal Spray Deposition Techniques

Non-Elemental Characterization of Films and Coatings

Nucleation, Film Growth, and Microstructural Evolution

Metallurgical Applications

Characterization of Thin Films and Coatings

Jet Vapor Deposition

Index