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This reference provides in-depth coverage of luminous chemical vapor deposition (LCVD) and
showcases the development and utilization of LCVD procedures in industrial scale applications it
offers a wide range of examples, case studies, and recommendations for clear understanding of this
innovative technology. The book provides broad coverage of the complex subjects and principles in
material formation and deposition, surface-state of solid materials, surface dynamics of
plasma-modified surfaces, imperturbable surface-states, interface engineering, the use of LCVD in the design
of biomaterials, and more.
From the Preface: “...Upon publication of
[Plasma Polymerization, Academic Press, 1985], the
author had a well established concept that plasma polymerization is not an ionization driven chemical
process, but a chemical process driven by the dissociation of molecules caused by the impact of
low energy electrons but could not find the decisive phenomenon to support the concept...The
author hopes this book will provide enough impetus for pursuit of the truth in the ever-expanding
inter-disciplinary domains of luminous chemical vapor deposition and interface engineering...”
Target Audience: Chemical and materials engineers and technologists; researchers involved
in nanofilm technology, biomaterials, microsensors, microelectronics, corrosion avoidance,
composite materials, and selective membranes and barriers; and upper-levels students in these disciplines.
Table of Contents:
Fundamentals of LCVD:
Introduction
Domain of Luminous Chemical Vapor Deposition
Luminous Gas Phase
Creation of Chemically Reactive Species in Luminous Chemical Vapor Deposition
Growth and Deposition Mechanisms
Dangling Bonds
Chemical Structures of Organic Compounds for Luminous Chemical Vapor Deposition
Deposition Kinetics
Ablation by Luminous Gas (Low Pressure Plasma)
Competitive Ablation and Polymerization
Internal Stress in Material Formed by Luminous Chemical Vapor Deposition
Operation of LCVD and LCVT
Modes of Operation and Scale-Up Principle
Direct Current and Alternating Current Discharge
Magnetron Discharge for Luminous Chemical Vapor Deposition
Anode Magnetron Discharge
Low-Pressure Cascade Arc Torch
Anode Magnetron Torch
Primary, Secondary and Pulsed Discharges
Reactor Size
Flow Pattern
Composition-Graded Transition Phase
Tumbler Reactor
Fundamentals of Surface and Interface:
Surface Configuration
Surface State
Surface Dynamics
Contact Angle and Wettability
Sessile Bubble Formation and Detachment
Interface Engineering:
System Approach Interface Engineering
Creation of an Imperturbable Surface
Creating Adhesion to Substrate Surface
Corrosion Protection of Aluminum Alloys
Corrosion Protection of Ion Vapor-Deposited Aluminum
Corrosion Protection of Cold-Rolled Steel and Pure Iron
Membrane Preparation and Modification
Application of Luminous Chemical Vapor Deposition in Biomaterials
Economical Advantages of Luminous Chemical Vapor Deposition
Index
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