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This volume provides a comprehensive review of current plasma technology. It begins by
discussing fundamentals, including plasma production and control, high-pressure discharges, modeling
and simulation, diagnostics, dust control, and etching. Following this are chapters describing
specific application areas; these include polymer treatments, solar cells, coating and spray
methods, biomaterials and tissue engineering, sterilization and waste treatment, plasma propulsion,
plasma display panels, and anti-corrosion coatings.
From the Preface: “...[E]normous advancements in the basic, diagnostic and experimental aspects
of plasma science have been made, so that many other science areas and industrial fields have
been permeated by plasma processes: polymers, textiles, biomaterials, microfluidics, composite
materials, paper, packaging, automobile, waste treatment, cultural heritage and corrosion protection, to name
but a few...”
Target Audience: Students, researchers, and technologists in academia and industry who are
concerned with plasma technology and its myriad applications.
Table of Contents:
Basic Approaches to Plasma Production and Control
Plasma Sources and Reactor Configurations
Advanced Simulations for Industrial Plasma Applications
Modeling and Diagnostics of He Discharges for Treatment of Polymers
Three-Dimensional Modeling of Thermal Plasmas (RF and Transferred Arc) for the Design of
Sources and Industrial Processes
Radiofrequency Plasma Sources for Semiconductor Processing
Advanced Plasma Diagnostics for Thin-Film Deposition
Plasma Processing of Polymers by a Low-Frequency Discharge with Asymmetrical Configuration
of Electrodes
Fundamentals on Plasma Deposition of Fluorocarbon Films
Plasma CVD Processes for Thin Film Silicon Solar Cells
VHF Plasma Production for Solar Cells
Growth Control of Clusters in Reactive Plasmas and Application to High-Stability a-Si:H Film
Deposition
Micro- and Nanostructuring in Plasma Processes for Biomaterials: Micro- and Nano-Features
as Powerful Tools to Address Selective Biological Responses
Chemical Immobilization of Biomolecules on Plasma-Modified Substrates for Biomedical Applications
In Vitro Methods to Assess the Biocompatibility of Plasma-Modified Surfaces
Cold Gas Plasma in Biology and Medicine
Mechanisms of Sterilization and Decontamination of Surfaces by Low-Pressure Plasma
Application of Atmospheric Pressure Glow Plasma: Powder Coating in Atmospheric Pressure
Glow Plasma
Hydrocarbon and Fluorocarbon Thin Film Deposition in Atmospheric Pressure Glow
Dielectric Barrier Discharges
Remark on Production of Atmospheric Pressure Non-Thermal Plasmas for Modern Applications
Present Status and Future of Cold Plasma Displays
Characteristics of PDP Plasmas
Recent Progress in Plasma Spray Processing
Electrohydraulic Discharge Direct Plasma Water Treatment Processes
Development and Physics Issues of an Advanced Space Propulsion
Index
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